Spatial electron density distribution in a high-power pulsed magnetron discharge

J. Bohlmark, J. T. Gudmundsson, J. Alami, M. Latteman, U. Helmersson

Rannsóknarafurð: Framlag til fræðitímaritsGreinritrýni

91 Tilvitnanir (Scopus)

Útdráttur

The spatial electron density distribution was measured as function of time in a high-power pulsed magnetron discharge. A Langmuir probe was positioned in various positions below the target and the electron density was mapped out. We recorded peak electron densities exceeding 1019 m-3 in a close vicinity of the target. The dynamics of the discharge showed a dense plasma expanding from the "race-track" axially into the vacuum chamber. We also record electrons trapped in a magnetic bottle where the magnetron magnetic field is zero, formed due to the unbalanced magnetron.

Upprunalegt tungumálEnska
Síður (frá-til)346-347
Síðufjöldi2
FræðitímaritIEEE Transactions on Plasma Science
Bindi33
Númer tölublaðs2 I
DOI
ÚtgáfustaðaÚtgefið - apr. 2005

Athugasemd

Funding Information:
Manuscript received June 22, 2004; revised December 3, 2004. This work was supported in part by the Swedish Foundation for Strategic Research, in part by the Swedish Research Council and in part by the Icelandic Research Council, and the European Commission.

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