SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering. The substrates were held at temperatures ranging from 100 to 850°C. For growth temperatures as low as 350°C epitaxial growth is observed. Below 350°C the films are polycrystalline and three different orientations (100), (110), and (111) can be observed using X-ray diffraction. Atomic force microscopy shows that films deposited at temperatures below 350°C and above 650°C are smooth while the surfaces of the films made at intermediate temperatures are rough and faceted. As growth temperatures decrease below 250°C, the films show decreasing amount of Sr.
This work was financially supported by Swedish National Board for Industrial and Technical Development (NUTEK), Swedish Natural Science Research Council (NFR), and Swedish Strategic Foundation (SSF) through the Superconductor Consortium.