Growth of SrTiO3 thin films on LaAlO3(001) substrates; the influence of growth temperature on composition, orientation, and surface morphology

Xin Wang, Sveinn Olafsson, Per Sandström, Ulf Helmersson

Rannsóknarafurð: Framlag til fræðitímaritsGreinritrýni

11 Tilvitnanir (Scopus)

Útdráttur

SrTiO3 films have been grown on LaAlO3(001) single crystal substrates using rf-sputtering. The substrates were held at temperatures ranging from 100 to 850°C. For growth temperatures as low as 350°C epitaxial growth is observed. Below 350°C the films are polycrystalline and three different orientations (100), (110), and (111) can be observed using X-ray diffraction. Atomic force microscopy shows that films deposited at temperatures below 350°C and above 650°C are smooth while the surfaces of the films made at intermediate temperatures are rough and faceted. As growth temperatures decrease below 250°C, the films show decreasing amount of Sr.

Upprunalegt tungumálEnska
Síður (frá-til)181-186
Síðufjöldi6
FræðitímaritThin Solid Films
Bindi360
Númer tölublaðs1-2
DOI
ÚtgáfustaðaÚtgefið - 1 feb. 2000

Athugasemd

Funding Information:
This work was financially supported by Swedish National Board for Industrial and Technical Development (NUTEK), Swedish Natural Science Research Council (NFR), and Swedish Strategic Foundation (SSF) through the Superconductor Consortium.

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