The frequency dependence of the discharge properties in a capacitively coupled oxygen discharge

J. T. Gudmundsson, D. I. Snorrason, Hólmfríður Hannesdottir

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

We use the one-dimensional object-oriented particle-in-cell Monte Carlo collision code oopd1 to explore the evolution of the charged particle density profiles, electron heating mechanism, the electron energy probability function (EEPF), and the ion energy distribution in a single frequency capacitively coupled oxygen discharge, with driving frequency in the range 12-100 MHz. At a low driving frequency and low pressure (5 and 10 mTorr), a combination of stochastic (α-mode) and drift ambipolar (DA) heating in the bulk plasma (the electronegative core) is observed and the DA-mode dominates the time averaged electron heating. As the driving frequency or pressure are increased, the heating mode transitions into a pure α-mode, where electron heating in the sheath region dominates. At low pressure (5 and 10 mTorr), this transition coincides with a sharp decrease in electronegativity. At low pressure and low driving frequency, the EEPF is concave. As the driving frequency is increased, the number of low energy electrons increases and the relative number of higher energy electrons (>10 eV) increases. At high driving frequency, the EEPF develops a convex shape or becomes bi-Maxwellian.

Original languageEnglish
Article number025009
JournalPlasma Sources Science and Technology
Volume27
Issue number2
DOIs
Publication statusPublished - 6 Feb 2018

Bibliographical note

Publisher Copyright:
© 2018 IOP Publishing Ltd.

Other keywords

  • capacitively coupled discharge
  • electron heating
  • oxygen
  • particle-in-cell/Monte Carlo collision

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