The effect of singlet metastable states on the ion energy distribution in capacitively coupled oxygen discharges

Jón Tómas Guðmundsson, Holmfridur Hannesdottir

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	7-9
Journal	Proceedings of the 23rd International Symposium on Plasma Chemistry
DOIs	https://doi.org/10.1088/1361-6463/aa65ed
Publication status	Published - 2017

Access to Document

@article{a67116dd086c45118f7355fc60a5938a,

title = "The effect of singlet metastable states on the ion energy distribution in capacitively coupled oxygen discharges",

author = "Gu{\dh}mundsson, {J{\'o}n T{\'o}mas} and Holmfridur Hannesdottir",

year = "2017",

doi = "10.1088/1361-6463/aa65ed",

language = "English",

pages = "7--9",

journal = "Proceedings of the 23rd International Symposium on Plasma Chemistry",

}

TY - JOUR

T1 - The effect of singlet metastable states on the ion energy distribution in capacitively coupled oxygen discharges

AU - Guðmundsson, Jón Tómas

AU - Hannesdottir, Holmfridur

PY - 2017

Y1 - 2017

U2 - 10.1088/1361-6463/aa65ed

DO - 10.1088/1361-6463/aa65ed

M3 - Conference article

SP - 7

EP - 9

JO - Proceedings of the 23rd International Symposium on Plasma Chemistry

JF - Proceedings of the 23rd International Symposium on Plasma Chemistry

ER -