Abstract
We report a study on the spatial homogeneity and nitridation of a nanopattern template using a spectroscopic photoemission and low energy electron microscopy. The template was composed of Al nanodots which were patterned into a SiO 2 /Si(1 1 1) surface using e-beam lithography and reactive ion etching. The template exhibited a global inhomogeneity in terms of the local topography, Al composition and structure of the individual nanopatterns. After nitridation, the individual nanopatterns were diminished, more corrugated and faceted. The nitridated nanopatterns were structurally ordered but differently orientated. The nitridation effectively removed the fluorine contaminants by decomposition of the fluorocarbon sidewalls, resulting in the AlN nanopatterns and partially nitridated Si substrate surface outside the nanopattern domains.
Original language | English |
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Pages (from-to) | 349-357 |
Number of pages | 9 |
Journal | Applied Surface Science |
Volume | 264 |
DOIs | |
Publication status | Published - 1 Jan 2013 |
Bibliographical note
Funding Information:The work was financially supported by the Icelandic Research Fund . We also acknowledge the financial help from European LIght Sources Activities (ELIS) grant operated at Max lab, and practical assistances from Max lab staff.
Other keywords
- AlN
- Nanopattern
- Nitridation
- Spectroscopic photoemission and low-energy electron microscopy