The roles of the metastable atoms O(1D) and molecules O2(a1Δg) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object-oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O2(X3∑g-), O2(a1Δg), O(3P), O(1D), O2+, O+, O-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O2(a1Δg) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.
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- Capacitively coupled discharge
- Electron heating
- Particle-in-cell/Monte Carlo