On the role of metastables in capacitively coupled oxygen discharges

J. T. Gudmundsson; M. A. Lieberman

doi:10.1088/0963-0252/24/3/035016

On the role of metastables in capacitively coupled oxygen discharges

J. T. Gudmundsson, M. A. Lieberman

Faculty of Physical Sciences

Research output: Contribution to journal › Article › peer-review

21 Citations (Scopus)

Abstract

The roles of the metastable atoms O(¹D) and molecules O₂(a¹Δ_g) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object-oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O₂(X³∑_g^-), O₂(a¹Δ_g), O(³P), O(¹D), O₂⁺, O⁺, O^-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O₂(a¹Δ_g) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.

Original language	English
Article number	035016
Journal	Plasma Sources Science and Technology
Volume	24
Issue number	3
DOIs	https://doi.org/10.1088/0963-0252/24/3/035016
Publication status	Published - 1 May 2015

Bibliographical note

Publisher Copyright:
© 2015 IOP Publishing Ltd.

Other keywords

Capacitively coupled discharge
Electron heating
Metastables
Oxygen
Particle-in-cell/Monte Carlo

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10.1088/0963-0252/24/3/035016

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title = "On the role of metastables in capacitively coupled oxygen discharges",

abstract = "The roles of the metastable atoms O(1D) and molecules O2(a1Δg) in a capacitively coupled rf driven oxygen discharge at 50 mTorr are explored using the one-dimensional object-oriented PIC/MCC code oopd1, which has one spatial dimension and three velocity components. The oxygen discharge model considers the species O2(X3∑g-), O2(a1Δg), O(3P), O(1D), O2+, O+, O-, and electrons. The particle density profiles, the electron heating rate profile, the electron energy probability function and the ion energy distribution function at the grounded electrode are explored, including and/or excluding the metastables and secondary electron emission. We find that detachment by the metastable molecule O2(a1Δg) has a significant influence on the discharge properties such as the electronegativity, the effective electron temperature and the electron heating processes.",

keywords = "Capacitively coupled discharge, Electron heating, Metastables, Oxygen, Particle-in-cell/Monte Carlo",

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KW - Capacitively coupled discharge

KW - Electron heating

KW - Metastables

KW - Oxygen

KW - Particle-in-cell/Monte Carlo

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On the role of metastables in capacitively coupled oxygen discharges

Abstract

Bibliographical note

Other keywords

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