On the electron energy in the high power impulse magnetron sputtering discharge

J. T. Gudmundsson; P. Sigurjonsson; P. Larsson; D. Lundin; U. Helmersson

doi:10.1063/1.3151953

On the electron energy in the high power impulse magnetron sputtering discharge

J. T. Gudmundsson, P. Sigurjonsson, P. Larsson, D. Lundin, U. Helmersson

Faculty of Physical Sciences

Research output: Contribution to journal › Article › peer-review

60 Citations (Scopus)

Abstract

The temporal variation of the electron energy distribution function (EEDF) was measured with a Langmuir probe in a high power impulse magnetron sputtering (HiPIMS) discharge at 3 and 20 mTorr pressures. In the HiPIMS discharge a high power pulse is applied to a planar magnetron giving a high electron density and highly ionized sputtered vapor. The measured EEDF is Maxwellian-like during the pulse; it is broader for lower discharge pressure and it becomes narrower as the pulse progresses. This indicates that the plasma cools as the pulse progresses, probably due to high metal content of the discharge.

Original language	English
Article number	123302
Journal	Journal of Applied Physics
Volume	105
Issue number	12
DOIs	https://doi.org/10.1063/1.3151953
Publication status	Published - 2009

Bibliographical note

Funding Information:
This work was partially supported by the Icelandic Research Fund, the University of Iceland Research Fund, and the Swedish Research Council.

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abstract = "The temporal variation of the electron energy distribution function (EEDF) was measured with a Langmuir probe in a high power impulse magnetron sputtering (HiPIMS) discharge at 3 and 20 mTorr pressures. In the HiPIMS discharge a high power pulse is applied to a planar magnetron giving a high electron density and highly ionized sputtered vapor. The measured EEDF is Maxwellian-like during the pulse; it is broader for lower discharge pressure and it becomes narrower as the pulse progresses. This indicates that the plasma cools as the pulse progresses, probably due to high metal content of the discharge.",

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AU - Gudmundsson, J. T.

AU - Sigurjonsson, P.

AU - Larsson, P.

AU - Lundin, D.

AU - Helmersson, U.

N1 - Funding Information: This work was partially supported by the Icelandic Research Fund, the University of Iceland Research Fund, and the Swedish Research Council.

PY - 2009

Y1 - 2009

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AB - The temporal variation of the electron energy distribution function (EEDF) was measured with a Langmuir probe in a high power impulse magnetron sputtering (HiPIMS) discharge at 3 and 20 mTorr pressures. In the HiPIMS discharge a high power pulse is applied to a planar magnetron giving a high electron density and highly ionized sputtered vapor. The measured EEDF is Maxwellian-like during the pulse; it is broader for lower discharge pressure and it becomes narrower as the pulse progresses. This indicates that the plasma cools as the pulse progresses, probably due to high metal content of the discharge.

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On the electron energy in the high power impulse magnetron sputtering discharge

Abstract

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