On the deposition rate and ionized flux fraction in high power impulse magnetron sputtering (HiPIMS)

Jón Tómas Guðmundsson; Hamidreza Hajihoseini; Michael A. Raadu; Daniel Lundin; Martin Rudolph; Tiberiu M. Minea; Nils Brenning

doi:10.14332/svc21.proc.0022

On the deposition rate and ionized flux fraction in high power impulse magnetron sputtering (HiPIMS)

Jón Tómas Guðmundsson, Hamidreza Hajihoseini, Michael A. Raadu, Daniel Lundin, Martin Rudolph, Tiberiu M. Minea, Nils Brenning

Faculty of Physical Sciences

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Journal	Proceedings of the 64th Society of Vacuum Coaters Annual Technical Conferenece
DOIs	https://doi.org/10.14332/svc21.proc.0022
Publication status	Published - 2021

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10.14332/svc21.proc.0022

Cite this

@article{f4ff9b85681843f1b6267e73ac8295ba,

title = "On the deposition rate and ionized flux fraction in high power impulse magnetron sputtering (HiPIMS)",

author = "Gu{\dh}mundsson, {J{\'o}n T{\'o}mas} and Hamidreza Hajihoseini and Raadu, {Michael A.} and Daniel Lundin and Martin Rudolph and Minea, {Tiberiu M.} and Nils Brenning",

year = "2021",

doi = "10.14332/svc21.proc.0022",

language = "English",

journal = " Proceedings of the 64th Society of Vacuum Coaters Annual Technical Conferenece",

}

TY - JOUR

T1 - On the deposition rate and ionized flux fraction in high power impulse magnetron sputtering (HiPIMS)

AU - Guðmundsson, Jón Tómas

AU - Hajihoseini, Hamidreza

AU - Raadu, Michael A.

AU - Lundin, Daniel

AU - Rudolph, Martin

AU - Minea, Tiberiu M.

AU - Brenning, Nils

PY - 2021

Y1 - 2021

U2 - 10.14332/svc21.proc.0022

DO - 10.14332/svc21.proc.0022

M3 - Conference article

JO - Proceedings of the 64th Society of Vacuum Coaters Annual Technical Conferenece

JF - Proceedings of the 64th Society of Vacuum Coaters Annual Technical Conferenece

ER -