On recycling in high power impulse magnetron sputtering discharges

Jón Tómas Guðmundsson; Nils Brenning; Michael A. Raadu; T. J. Petty; Tiberiu M. Minea; Daniel Lundin

On recycling in high power impulse magnetron sputtering discharges

Jón Tómas Guðmundsson, Nils Brenning, Michael A. Raadu, T. J. Petty, Tiberiu M. Minea, Daniel Lundin

Faculty of Physical Sciences

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	265-266
Journal	ESCAMPIG XXIV
Publication status	Published - 2018

Access to Document

http://langmuir.raunvis.hi.is/~tumi/ps/icpigXXXIV_recycle.pdf

Cite this

@article{317d1cb9a4384c40a8667fb776992ec9,

title = "On recycling in high power impulse magnetron sputtering discharges",

author = "Gu{\dh}mundsson, {J{\'o}n T{\'o}mas} and Nils Brenning and Raadu, {Michael A.} and Petty, {T. J.} and Minea, {Tiberiu M.} and Daniel Lundin",

year = "2018",

language = "English",

pages = "265--266",

journal = "ESCAMPIG XXIV",

}