Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)6)

Po Yuan Shih; Maicol Cipriani; Christian Felix Hermanns; Jens Oster; Klaus Edinger; Armin Gölzhäuser; Oddur Ingólfsson

doi:10.3762/BJNANO.13.13

Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)₆)

Po Yuan Shih, Maicol Cipriani, Christian Felix Hermanns, Jens Oster, Klaus Edinger, Armin Gölzhäuser, Oddur Ingólfsson^*

^*Corresponding author for this work

Faculty of Physical Sciences

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron beam-induced deposition (FEBID) of this precursor. The DEA and DI experiments are compared to previous work, differences are addressed, and the nature of the underlying resonances leading to the observed DEA processes are discussed in relation to an earlier electron transmission study. Relative contributions of individual ionic species obtained through DEA and DI of Mo(CO)6 and the average CO loss per incident are calculated and compared to the composition of the FEBID deposits produced.

Original language	English
Pages (from-to)	182-191
Number of pages	10
Journal	Beilstein Journal of Nanotechnology
Volume	13
DOIs	https://doi.org/10.3762/BJNANO.13.13
Publication status	Published - 2022

Bibliographical note

Funding Information:
This project has received funding from the European Union’s Horizon 2020 research and innovation programme under the Marie Skłodowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1−3). MC acknowledges a doctoral grant from the University of Iceland Research Fund.

Funding Information:
This project has received funding from the European Union?s Horizon 2020 research and innovation programme under the Marie Sk?odowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1?3). MC acknowledges a doctoral grant from the University of Iceland Research Fund

Publisher Copyright:
© 2022 Shih et al.; licensee Beilstein-Institut.License and terms: see end of document

Other keywords

Dissociative electron attachment
Dissociative ionisation
Focused electron beam-induced deposition
Molybdenum hexacarbonyl

Access to Document

10.3762/BJNANO.13.13

Cite this

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title = "Low-energy electron interaction and focused electron beaminduced deposition of molybdenum hexacarbonyl (Mo(CO)6)",

abstract = "Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron beam-induced deposition (FEBID) of this precursor. The DEA and DI experiments are compared to previous work, differences are addressed, and the nature of the underlying resonances leading to the observed DEA processes are discussed in relation to an earlier electron transmission study. Relative contributions of individual ionic species obtained through DEA and DI of Mo(CO)6 and the average CO loss per incident are calculated and compared to the composition of the FEBID deposits produced.",

keywords = "Dissociative electron attachment, Dissociative ionisation, Focused electron beam-induced deposition, Molybdenum hexacarbonyl",

author = "Shih, {Po Yuan} and Maicol Cipriani and Hermanns, {Christian Felix} and Jens Oster and Klaus Edinger and Armin G{\"o}lzh{\"a}user and Oddur Ing{\'o}lfsson",

note = "Funding Information: This project has received funding from the European Union{\textquoteright}s Horizon 2020 research and innovation programme under the Marie Sk{\l}odowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1−3). MC acknowledges a doctoral grant from the University of Iceland Research Fund. Funding Information: This project has received funding from the European Union?s Horizon 2020 research and innovation programme under the Marie Sk?odowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1?3). MC acknowledges a doctoral grant from the University of Iceland Research Fund Publisher Copyright: {\textcopyright} 2022 Shih et al.; licensee Beilstein-Institut.License and terms: see end of document",

year = "2022",

doi = "10.3762/BJNANO.13.13",

language = "English",

volume = "13",

pages = "182--191",

journal = "Beilstein Journal of Nanotechnology",

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AU - Shih, Po Yuan

AU - Cipriani, Maicol

AU - Hermanns, Christian Felix

AU - Oster, Jens

AU - Edinger, Klaus

AU - Gölzhäuser, Armin

AU - Ingólfsson, Oddur

N1 - Funding Information: This project has received funding from the European Union’s Horizon 2020 research and innovation programme under the Marie Skłodowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1−3). MC acknowledges a doctoral grant from the University of Iceland Research Fund. Funding Information: This project has received funding from the European Union?s Horizon 2020 research and innovation programme under the Marie Sk?odowska-Curie grant agreement No 722149. M.C. and O.I. acknowledge support from the Icelandic Center of Research (RANNIS), grant no. 13049305(1?3). MC acknowledges a doctoral grant from the University of Iceland Research Fund Publisher Copyright: © 2022 Shih et al.; licensee Beilstein-Institut.License and terms: see end of document

PY - 2022

Y1 - 2022

N2 - Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron beam-induced deposition (FEBID) of this precursor. The DEA and DI experiments are compared to previous work, differences are addressed, and the nature of the underlying resonances leading to the observed DEA processes are discussed in relation to an earlier electron transmission study. Relative contributions of individual ionic species obtained through DEA and DI of Mo(CO)6 and the average CO loss per incident are calculated and compared to the composition of the FEBID deposits produced.

AB - Motivated by the potential role of molybdenum in semiconductor materials, we present a combined theoretical and experimental gas-phase study on dissociative electron attachment (DEA) and dissociative ionization (DI) of Mo(CO)6 in comparison to focused electron beam-induced deposition (FEBID) of this precursor. The DEA and DI experiments are compared to previous work, differences are addressed, and the nature of the underlying resonances leading to the observed DEA processes are discussed in relation to an earlier electron transmission study. Relative contributions of individual ionic species obtained through DEA and DI of Mo(CO)6 and the average CO loss per incident are calculated and compared to the composition of the FEBID deposits produced.

KW - Dissociative electron attachment

KW - Dissociative ionisation

KW - Focused electron beam-induced deposition

KW - Molybdenum hexacarbonyl

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