Abstract
Synopsis The current contribution relates to a recently endorsed Marie Skłodowska-Curie Innovative Training Network on Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods; ELENA. Here we discuss the objectives of ELENA relating to the understanding the low energy electron induced processes underpinning two emerging nanotechnology methods; focused electron beam induced deposition (FEBID) and extreme ultra violet lithography (EUVL).
| Original language | English |
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| Article number | 062043 |
| Journal | Journal of Physics: Conference Series |
| Volume | 875 |
| Issue number | 7 |
| DOIs | |
| Publication status | Published - 18 Aug 2017 |
| Event | 30th International Conference on Photonic, Electronic, and Atomic Collisions, ICPEAC 2017 - Cairns, Australia Duration: 26 Jul 2017 → 1 Aug 2017 |