Langmuir probe study of the plasma parameters in the HiPIMS discharge

Jón Tómas Guðmundsson, P. Sigurjonsson, P. Larsson, Daniel Lundin, U. Helmersson

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)234 – 239
Journal 52nd Annual Technical Conference Proceedings
Publication statusPublished - 2009

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