Heavy species dynamics in high power impulse magnetron sputtering discharges

Martin Čada, Nikolay Britun, Ante Hecimovic, Jon Tomas Gudmundsson, Daniel Lundin

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

3 Citations (Scopus)

Abstract

The energy and the composition of the film forming species strongly influence the properties of the films being deposited. In HiPIMS, the film forming material consists of neutral atoms sputtered off the target and its ions. In the case of reactive sputtering, atoms, molecules and ions of the reactive gas also contribute to the film. In this chapter we give an extended overview of the measured fundamental plasma parameters related to ions and neutrals along with a description of suitable techniques for characterizing these species. One of the key differences between dcMS and HiPIMS is the ionization fraction of the sputtered material. Here we also discuss the methods applied to determine the ionization fraction of the sputtered material and the different ways it is quantified, and then survey the ionized flux fraction determined for the HiPIMS discharge. Furthermore, the method of laser-induced fluorescence is utilized to explore the spatio-temporal behavior of the ions and neutrals, and the observations are discussed. We also discuss and compare the ion energy distribution from dcMS and HiPIMS discharges.

Original languageEnglish
Title of host publicationHigh Power Impulse Magnetron Sputtering
Subtitle of host publicationFundamentals, Technologies, Challenges and Applications
PublisherElsevier
Pages111-158
Number of pages48
ISBN (Electronic)9780128124543
ISBN (Print)9780128124550
DOIs
Publication statusPublished - 1 Jan 2019

Bibliographical note

Publisher Copyright:
© 2020 Elsevier Inc. All rights reserved.

Other keywords

  • Ion energy distribution function
  • Ion flux
  • Ionization fraction

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