TY - JOUR
T1 - Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
AU - Gudmundsson, J. T.
AU - Alami, J.
AU - Helmersson, U.
PY - 2001/5/28
Y1 - 2001/5/28
N2 - We demonstrate the creation of high-density plasma in a pulsed magnetron discharge. A 2.4 MW pulse, 100 μs wide, with a repetition frequency of 50 Hz is applied to a planar magnetron discharge to study the temporal behavior of the plasma parameters: the electron energy distribution function, the electron density, and the average electron energy. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at 8 × 1017 m-3, 127 μs after initiating the pulse. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high-energy electron group, the electron density peaks, and the electron energy distribution appears to be Maxwellian like. Following the electron density peak, the plasma becomes more Druyvesteyn like with a higher average electron energy.
AB - We demonstrate the creation of high-density plasma in a pulsed magnetron discharge. A 2.4 MW pulse, 100 μs wide, with a repetition frequency of 50 Hz is applied to a planar magnetron discharge to study the temporal behavior of the plasma parameters: the electron energy distribution function, the electron density, and the average electron energy. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at 8 × 1017 m-3, 127 μs after initiating the pulse. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high-energy electron group, the electron density peaks, and the electron energy distribution appears to be Maxwellian like. Following the electron density peak, the plasma becomes more Druyvesteyn like with a higher average electron energy.
UR - http://www.scopus.com/inward/record.url?scp=0035926855&partnerID=8YFLogxK
U2 - 10.1063/1.1376150
DO - 10.1063/1.1376150
M3 - Article
AN - SCOPUS:0035926855
SN - 0003-6951
VL - 78
SP - 3427
EP - 3429
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 22
ER -