Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge

J. T. Gudmundsson*, J. Alami, U. Helmersson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

120 Citations (Scopus)

Abstract

We demonstrate the creation of high-density plasma in a pulsed magnetron discharge. A 2.4 MW pulse, 100 μs wide, with a repetition frequency of 50 Hz is applied to a planar magnetron discharge to study the temporal behavior of the plasma parameters: the electron energy distribution function, the electron density, and the average electron energy. The electron density in the vicinity of the substrate, 20 cm below the cathode target, peaks at 8 × 1017 m-3, 127 μs after initiating the pulse. Towards the end of the pulse two energy groups of electrons are present with a corresponding peak in average electron energy. With the disapperance of the high-energy electron group, the electron density peaks, and the electron energy distribution appears to be Maxwellian like. Following the electron density peak, the plasma becomes more Druyvesteyn like with a higher average electron energy.

Original languageEnglish
Pages (from-to)3427-3429
Number of pages3
JournalApplied Physics Letters
Volume78
Issue number22
DOIs
Publication statusPublished - 28 May 2001

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