Effect of high temperature oxidation of 4H-SiC on the near-interface traps measured by TDRC

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@article{0ce03143b4c841c5898b3d352e8529d7,

title = "Effect of high temperature oxidation of 4H-SiC on the near-interface traps measured by TDRC",

author = "Sveinbj{\"o}rnsson, {Einar {\"O}rn} and Fredrik Allerstam",

year = "2009",

language = "English",

pages = "537--540",

journal = "Materials Science Forum",

issn = "0255-5476",

publisher = "Trans Tech Publications Ltd",

}